MEGPIE©, Single Wafer
MegPie™ can be used for single wafer processing on all type of spinners .
The megasonic transducer is placed on an arm having a Z adjustable position.
Apart of having room to install the wafer on the chuck, there is no need to have a lateral movement of the arm on the machine.
Because of the shape of the transducer as a “pie slice”, MegPie© will be as efficient in the centre as on the periphery of the wafer (uniform power distribution).
ProSys megasonic transducer can process wafers up to 450mm diameter.
The chemicals present between the megasonic transducer and the wafer transmits megasonic waves. This reduces the required quantity of chemicals, and increases flexibility. Various processes can be handled on the same equipment.